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MX61/MX61L - Upright semiconductor inspection microscopes
With our long experience in the fields of industry and material science, Olympus provides many clear-cut solutions making electronic device inspections easier, quicker and more efficient.
The MX61/MX61L semiconductor inspection microscopes have been developed specifically to meet the demands of wafer inspection. These user-friendly microscopes allow operators to work in an ergonomically correct position and benefit from smoother operation throughout extended inspection periods. Productivity and integration of the instruments into the work area are, thereby, maximised.
Models
MX61: 6" and 8" wafer inspection
MX61L: 300mm wafer inspection
Olympus MX microscopes benefit every customer right from the start --- meeting their needs in full, without wasting time or money.
- Fast startup
- Easy operation
- Failure analysis
- Future expandability |
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| Accessories |
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 |  | Perfectly designed for waferloader attachment (optional)
The MX61 frame is perfectly designed to suit the AL110 waferloader series from Olympus. The slim design of the MX61 frame shortens the transfer distance and makes the wafer handling faster as ever. |  |  | Real time laser auto focus (optional)
For full automated inspection tasks or the inspection of low contrast specimen (e.g. polished surfaces) the tracking function of the real time laser auto focus ensures always the correct focus position. |  |  | Disc Confocal attachment for real time images with 0,2 µm resolution (optional)
For the inspection of most advanced semiconductor devices the resolution of the MX61 can be enhanced by the U-CFU confocal module. The patented disc provides excellent brightness and contrast. |  |  | Looking inside your wafer with reflected infra red illumination (optional)
The MX61 allows the adaptation of special infra red optical components to enable infra red microscopy. This allows looking through silicon layers which are not transparent for visible light. |  |  | Fluorescence observation for easy detection of resist residuals
For the easy detection of resist residuals and organic particles the MX61 can be equipped with a fluorescence mirror cube and high intensity light sources. |
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For your Industrial Micro-Imaging requirements in North America, please call our Customer Sevices Team to arrange an on-site demonstration, ask for more information at: 866-629-2450 (toll free), or complete the
on-line inquiry form.
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