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MX61/MX61L - Upright semiconductor inspection microscopes
With our long experience in the fields of industry and material science,
Olympus provides many clear-cut solutions making electronic device inspections easier,
quicker and more efficient.
The MX61/MX61L semiconductor inspection microscopes have been developed specifically
to meet the demands of wafer inspection. These user-friendly microscopes allow operators
to work in an ergonomically correct position and benefit from smoother operation
throughout extended inspection periods. Productivity and integration of the instruments
into the work area are, thereby, maximised.
Models
MX61: 6" and 8" wafer inspection
MX61L: 300mm wafer inspection
Olympus MX microscopes benefit every customer right from the start --- meeting their
needs in full, without wasting time or money.
- Fast startup
- Easy operation
- Failure analysis
- Future expandability |
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Features & Benefits |
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Always optimum contrast
The integrated motorised aperture stop is automatically adjusted to the
objective in use. Thus the best image quality for every magnification is achieved
making routine inspections more comfortable for the eyes and increases the failure
detection rate. |
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Various observation methods
The MX61 is equipped by default with brightfield and darkfield illumination.
In addition it allows the insertion of a observation cube to achieve polarised
light for differential interference contrast (DIC) or fluorescence illumination
for the detection of resist layers and organic particles. |
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Intuitive ‘Frontal Control’ for faster operation
With the MX61 there is no long search for a comfortable position or the
right controls. All important controls fall to hand at the front of the microscope
close to the focussing knobs. Objective change as well as illumination and aperture
stop adjustments can be operated without the need to take the eyes away from the
eyepieces. |
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Space saving design
The small footprint and slim design of the MX61 makes it easy to arrange
workplaces that are cost effective and practical. The slim frame design reduces
the transfer distance from wafer handling systems to the microscope stage. This
increases the wafer transfer speed thereby minimising the contamination risk. |
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Ergonomic design
The MX61 fulfils the most recent SEMI S2/S8 standards ensuring reliable
results and comfortable operation. |
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Ready for digital imaging
The MX61 is equipped with a PC interface that allows observing the microscope
status. Thus objective magnifications can be automatically stored while taking a
picture. This guarantees reliable image information for further processing and analysis. |
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New darkfield illuminator and newly designed objectives
The newly developed illuminator of the MX61 in combination with the new
Plan Fluoride BD2 objectives provides up to 2 times better darkfield contrast than
comparable microscopes in this class, thus making detection of finest defects much
faster and more reliable. |
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For your Industrial Micro-Imaging requirements in North America, please
call our Customer Sevices Team to arrange an on-site demonstration, ask
for more information at: 866-629-2450 (toll free),
or complete the
on-line inquiry form.
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