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You can perform inspection and analysis the way you want, by choosing either of the Dual-Engines of the MX61A.
Performing multiple tasks in a variety of ways is fundamental to today’s semiconductor manufacturing environment.
Based on the above concept, Olympus has developed a Dual-Engine solution - an Inspection-Engine and an Analysis-Engine - to provide flexibility to respond to future needs as they evolve. This will allow the automation of inspection/analysis in the semiconductor field to adapt to future needs over time.
The Dual-Engines fully bring out the high-performance of the MX61A, and provide automation, to fit your needs, for both inspection and analysis. |
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| Specifications |
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AUTOMATIC SEMICONDUCTOR INSPECTION MICROSCOPE SYSTEM MX61A : Specifications
| Optics |
Universal Infinity System (UIS2/UIS) optics |
| Illumination system |
Reflected light illumination system (FN 26.5)
12 V, 100 W halogen bulb (pre-centered).
Motorized brightfield/darkfield selection by mirror + 1 mirror unit (* optional). *
Any desired observation mirror unit can be added.
Motorized aperture iris diaphragm built in.
(Preset value for each objective lens, opened automatically for DF observation.)
Available reflected light observation methods:
[1]Brightfield; [2]Darkfield; [3]DIC; [4]Simplified Polarized Light; [5]Fluorescent Light; [6]near IR; [7]DUV
[7]requires MX2-BSW (PC) and cannot be configured with the MX-OPU61A operation unit. |
| Electrical system |
BX-UCB control box (12 V, 100 W).
Input rating: 100-120/220-240 V AC, 50/60 Hz, 3.5/1.5 A
Indicator LEDs: RMT (Remote) LED, ERR (Error) LED, module installation check LEDx 10.
Option slots: Power capacity (single slots) |
| Motorized focusing mechanism |
High-rigidity, 2-guide cross-roller guide system
Ball screw + Stepping motor drive.
Stroke: 25.4 mm.
Fine adjustment sensitivity: Below 1 µm. Resolution: 0.01 µm.
Maximum speed: 5 mm/sec. (Default: 3 mm/sec.)
Maximum load (including the stage holders)
• MX-STSP10: 10 kg
• MX-STSP15: 15 kg
• MX-STSP22: 22 kg |
| Auto focusing unit (optional) |
Pupil-division reflection active auto focusing using a laser diode and 2-division detector.
Multi-spot projection.
Laser wavelength: 785 nm (Class 1: JIS C6802 (2005), IEC60825-1 (2001), CDRH).
Tracking range : 5x: ±5000 µm and more 10x: ±2000 µm, 20x: ±1100 µm, 50x: ±400 µm, 100x: ±100µm, 150x:±50 µm, DUV: ±50 µm (only for DUV)
The tracking range is dependent on the specimen reflectivity and objective lens in use. |
| Observation tube |
Super-widefield erect image trinocular tube (FN 26.5)
MX-SWETTR (Optical path select 100:0, 0:100, tube inclination angle 0 to 42 degrees)
U-SWETTR-5 (Optical path select 100:0, 20:80, tube inclination angle 0 to 35 degrees)
Infra-red wide field trinocular tube (FN 22)
U-TR30IR (Optical path select 100:0, 0:100, tube inclination angle 30 degrees (fixed). |
| Motorized revolving nosepiece |
Brightfield 6-position motorized revolving nosepiece: U-D6REMC,
Brightfield/darkfield 5-position motorized revolving nosepiece: U-D5BDREMC,
Brightfield/darkfield 5-position centerable motorized revolving nosepiece: U-P5BDREMC,
Brightfield/darkfield 6-position motorized revolving nosepiece: U-D6BDREMC |
| UV248 optical system (optional) |
Wavelength: 248 ±4 nm
Light source: 80W mercury xenon lamp
Objective lens: Exclusive DUV objective lens / NA 0.9, WD 0.2 mm
Intermediate magnification: 2.5x
Filed number: 12.5 (Actual field of view 50 µm)
Usage environment: 23±5°C
Brightness adjustment: Motorized controlled from 0 through 100 % transmission
UV light guide: 2 m long or 5 m long
Controlled via PC only |
| Controllers |
Operation Unit MX-OPU61A
LCD |
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For your Industrial Micro-Imaging requirements in North America, please call our Customer Sevices Team to arrange an on-site demonstration, ask for more information at: 866-629-2450 (toll free), or complete the
on-line inquiry form.
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