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The AF system supports all visible (VIS)
light observation modes. |
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The AF system supports all visible (VIS) light observation modes.
The motorized DIC system features hand control.
The digital imaging system allows the operator to inspect a wafer by viewing a monitor. |
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The AF system supports all visible (VIS) light observation modes.
The AF set up is made on the operation module. AF can be operated using the hand switch, it can also be controlled with the operation module. |
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The wafer loading system increases the efficiency of wafer inspections.
A combination of the wafer loading system AL110 and a motorized stage MS200 provides a powerful support for wafer inspection operations. A wafer up to 200 mm is transported to the stage safely, and points to be inspected can be located consecutively based on a predefined recipe. |
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The motorized DIC system features hand control.
By attaching the optional motorized DIC components. DIC imaging is completely automated. Prism position can also be set using the hand switch. The MPLFLN series objective lenses with magnification range of 5x to 150x can be utilized. |
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The digital imaging system allows the operator to inspect a wafer by viewing a monitor.
Using the Olympus DP20, the operator views and records live images in a comfortable position. Live images in high resolution are displayed on the monitor in real time. |
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Custom wafers can be handled: If wafers are inspected in transmitted light illumination or if the thickness of an specimen to be inspected is 24 mm or more, please contact your Olympus Representative. |
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The AF system can be controlled using either a PC or the hand switch (Visible to DUV light).
The motorized stage system is compatible with wafers up to 300 mm.
The motorized DIC system can be controlled using either a PC or the hand switch.
The imaging system allows a digital
camera to be controlled on a PC. |
DUV observation can be selected with a single click.
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The motorized DUV observation system can be activated by a single click of a button. |
The AF system can be controlled using either a PC or the hand switch. |
| The AF set up and operation can be performed using the microscope control software, MX2-BSW. AF system operation can also be performed by using the hand switch. |
Easy Layout |
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The DUV system is controlled via a PC, allowing the lamp house box to be located under the table sparing valuable table space for operator comfort and safety. |
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The AF system can be controlled using either a PC or the hand switch (Visible to DUV light).
The AF set up and operation can be performed using the microscope control software, MX2-BSW. AF system operation can also be performed by using the hand switch. |
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The motorized stage system is compatible with wafers up to 300 mm.
High-precision motorized stages compatible with up to 300 mm* wafers are available. Advanced inspection and failure analyses are possible by using these stages.
* For information about 300mm compatible stage, please contact your Olympus Representative. |
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The motorized DIC system can be controlled using either a PC or the hand switch.
Motorized DIC observation can be performed using the microscope control software, MX2-BSW. The UIS2 series objective lenses with a magnification range of MPLFLN series 5x to 150x can be used. |
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The imaging system allows a digital camera to be controlled on a PC.
Images captured by the DP series digital cameras recommended by Olympus can be controlled. |
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Non-cemented DUV (Deep Ultra Violet) optical technology with super long-term reliability. |
Custom wafers can be handled: If wafers are inspected in transmitted light illumination or if the thickness of an specimen to be inspected is 24 mm or more, please contact your Olympus Representative.
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Compliance with SEMI S2 and S8.
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| MX61A complies with SEMI S2-0706 and S8-0705, CE, and other industry standards and specifications. A high level of reliability is verified with respect to ergonomic design, safety precautions, etc. |
Tilting observation tubes offers two options.
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To allow the operator to make observations in a comfortable position, tilting tubes with different optical path split ratios, MXSWETTR (100:0, 0:100) and U-SWETTR-5 (100:0, 20:80), are available as optional accessories. Either type that suits a specific application should be selected. |
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Model |
Inclination angle |
Light path selector(eyepiece/video port) |
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MX-SWETTR |
0°– 42° |
100:0 / 0:100 |
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U-SWETTR-5 |
0°– 35° |
100:0 / 20:80 |
Antistatic function.
The microscope body and observation tube have an antistatic finish and a breath shield to prevent a specimen from being contaminated.
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The motorized revolving nosepiece for use in a clean-room environment.
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Two motorized revolving nosepieces are offered for the MX61A system. They have great durability and are suitable for use in a clean-room environment. A new type of motor has been introduced to motorized 6-position and 5-position centerable nosepieces for Brightfield and Darkfield illumination. High-speed and quiet magnification switching has been realized. |
High quakeproof frame.
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A high-rigidity, vibration-resistant frame is used. Image blurs do not occur even at high magnifications in DUV observation. |
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For your Industrial Micro-Imaging requirements in North America, please call our Customer Sevices Team to arrange an on-site demonstration, ask for more information at: 866-629-2450 (toll free), or complete the
on-line inquiry form.
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