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Wafer Inspection System MX61A:
MX61A - Page 1
MX61A - Page 2
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MX61A - Page 2

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High Imaging performance.

The best imaging performance, particularly that in Brightfield and Darkfield, has been increased through the introduction of the new UIS2 optical system. In brightfield observation, crisp, natural color reproduction has been achieved. In Darkfield image brightness been increased by an average of over four times as compared with the famous Olympus UIS series systems.

UIS2 Objective Lens

Brightfield image (UIS2)


Darkfield image (UIS2) Darkfield image (conventional)


Light intensity is automatically adjusted to the optimum level.

Light intensity and contrast adjustments work in a way whereby they are automatically and optimally adjusted when the objective lens magnification or observational method is changed. This contributes to increasing the observational speed and reducing fatigue.



 



The active AF capable of observing a wide range of devices.

U-AFA2M series, a further advanced version of the active-type laser auto focus capable of high speed and accuracy . The introduction of a newly developed multi-spot sensor has enabled a substantial increase Autofocus stability by eliminating the effects of vertical topography on the specimen. Now the new U-AFA2M can perform exceptionally well in all observation methods, faster more repeatably. The U-AFA2M series comprises VIS (Visible) type and VIS/DUV compatible type.



UIS2 objective lenses with the highest parcentration.

To accommodate the smaller field of view found in digital imaging, the centration accuracy between high-magnification objective lenses have been improved 2x over the famous UIS series lenses. This has made a dramatic improvement in image centration when high power objectives are used. This means that the use of video monitors for imaging has become even more convenient.


UIS2 Objective Lens



Brightfield

Darkfield

DIC Fluorescence
B excitation (MPLFLN10X)


Deep Ultraviolet


Near infrared light
VIS (the same location)

0.15 µm line/space Cavity structure in MEMS device


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For your Industrial Micro-Imaging requirements in North America, please call our Customer Sevices Team to arrange an on-site demonstration, ask for more information at: 866-629-2450 (toll free), or complete the
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