You can perform inspection and analysis the way you want, by choosing either of the Dual-Engines of the MX61A.

Performing multiple tasks in a variety of ways is fundamental to today’s semiconductor manufacturing environment.
Based on the above concept, Olympus has developed a Dual-Engine solution - an Inspection-Engine and an Analysis-Engine - to provide flexibility to respond to future needs as they evolve. This will allow the automation of inspection/analysis in the semiconductor field to adapt to future needs over time.
The Dual-Engines fully bring out the high-performance of the MX61A, and provide automation, to fit your needs, for both inspection and analysis.