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The AL Series programmable wafer handlers are cost-effective and versatile, making them the clear choice when a programmable wafer handler is required to improve throughput. With a diversity of inspection modes, such as sequential sampling and micro/macro inspection of both front and back surfaces (including the ability to macro inspect the entire back surface of the wafer from 90° to 160°), the AL wafer handling systems are a reliable and efficient choice. A wide array of standard features include MX51/MX61/MX61L/MX80 integration, programmable inspection modes, non-contact wafer alignment, self-diagnostics and a stainless steel body for clean room compatibility. |
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| Specifications |
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AL110 Wafer Loader Series | Wafer diameter: | 4", 5", 6" orientation flat (O.F.) type or notch type (AL110-6 series)
6" and 8" orientation flat (O.F.) type or notvh type (AL110-8 series) | Cassette type: | Fluoroware H-Bar type (other types upon request) | Number of cassettes: | One (for loading and unloading of wafers) | Inspection modes: | Sequential and sampling (automatic transfer with programmable inspection time) | Transfer mode: | Micro inspection
Top macro inspection
Back macro inspection
Joystick direct drive for top macro inspection agle (maximum tilt: approx. 20 degrees) | Alignment of orientation flat: | Four user-selectable choices (one every 90 degrees)
O.F. alignment also available before unloading wafers into cassette (noticed wafers can also be aligned in case of 8-inch versions) | Wafer transfer: | Robot arms with vacuum pickup | Adaptable microscope: | MX40
MX50
MX51
MX61
MX61L
MX80
(Please contact OLYMPUS dealer for others) | Dimensions: | Main unit (mm):
520mm W x 580mm D x 297mm H (AL110-8 series)
430mm W x 520mm D x 297mm H (AL110-6 series) | Utility requirements: | Power source: AC100 to 120V 0.9A or AC220 to 240V 0.55A 50/60Hz. Vacuum pressure 246 to 212hPa (-500 to -600mhg) 20 liter/min. Connection tube: 1/4" polyurethane tube |
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For your Industrial Micro-Imaging requirements in North America, please call our Customer Sevices Team to arrange an on-site demonstration, ask for more information at: 866-629-2450 (toll free), or complete the
on-line inquiry form.
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