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IR Laser Confocal Microscopy: Bridging the gap between SEM and optical microscopy
The LEXT OLS-3000IR is our new near-IR laser based confocal microscope
for nondestructive interior observation of silicon wafers, IC chips, MEMS and other
devices. Packaging technology of semiconductor devices is rapidly advancing along
with the increase in the need for thinner and smaller electronics devices. Using
an infrared microscope, the LEXT OLS3000IR enables features that cannot be seen
visually -- such as SIP (System in Package), 3-dimensional mounting, and CSP (Chip
Scale Package) -- to be inspected, measured and analyzed nondestructively.
Ultra-fine subsurface resolution and clarity like a SEM. Fast, efficient and
easy-to-use like an optical microscope. Our LEXT OLS3000IR is the best of both worlds.
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Features & Benefits |
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This new laser scanning confocal technology is designed for applications requiring
ultra-precise measurement and observation. The new technology, introduced
in the OLS3000IR LEXT micro-imaging system, features sub-micron imaging with outstanding
resolution and accurate three-dimensional measurement capability.
The LEXT-IR provides:
- Both 3D observation and measurement in real time
- Resolution of 0.55um line and space patterns
- Z accuracy measurement of 3 =0.10+0.002L.
- Magnification from 120x to 12,960x, ideal for the continued reduction in feature
sizes
- No expensive and destructive sample preparation -- just place sample directly on
stage with no vacuum pump-down
- Fast measurement and observation tasks in high volume manufacturing applications
LEXT OLS3000IR provides the ability to measure and observe wafer thickness on SOI
wafers, Z measurement of gap, AuAl analysis at bonding pads, pattern defects, delamination
between silicon and resin, alignment offsets between chip and interposer, and more.
Our new LEXT microscopes enable every user to make quicker, more accurate sample
analyses, all based on strict traceability systems.
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For your Industrial Micro-Imaging requirements in North America, please
call our Customer Sevices Team to arrange an on-site demonstration, ask
for more information at: 866-629-2450 (toll free),
or complete the
on-line inquiry form.
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